We can provide solid-state power sources for large scientific devices with various frequencies and power levels. The overall equipment design adopts liquid cooling method, which can ensure more stable and reliable operation of the RF module, while reducing equipment operating noise. The overall equipment unit module can be designed for mechanical arm maintenance, and the cabinet can be designed as fully enclosed to avoid heat radiation outward. The cooling liquid interface can be designed and remotely controlled according to different requirements. The temperature, pressure, and flow rate of the cooling circulating liquid can be remotely monitored, and the main working parameters can be remotely monitored and set.